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Thin Film Thickness Measurement System

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K-MAC, Korea Materials & Analysis Corporation
Contact: Vera Shapovalova(Mr.)
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Address:104-11 Moonji Dong Yusung Ku Taejon,Daejeon

Details

Thin Film Thickness Measurement System is applied to define such characteristicsof thin films as thickness and optical constants. The models ST3000,ST 4000, ST 5000are meant specially for High Speed Wafer Measurement. Sample stages up to 50x50cmwith travel distance up to 30 cm are available. Optionally programmable AutoX-Y stage, motorized Z axis, CCD camera are available. Typical measurement rangeis 100A-50um.
Thin Film Thickness Measurement System

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